No. | Submitting author | Title | |
1 | H. Kirschner | How Metrology can improve Photoemission Tomography | PTB |
2 | A. Sokolov | Design, fabrication and characterization of highly efficient multilayer blazed gratings for the tender X-ray region | HZB |
3 | R. Geckeler | Advancing deflectometric form measurement of beamline optics: Current state and future strategies | PTB |
4 | N. Gutiérrez-Luna | High-reflectance Al mirrors protected with hot-deposited MgF2 or AlF3 | GOLD-IO-CSIC |
5 | T. Siefke | Wire grid polarizer for VUV applications | FSU Jena |
6 | V. Zabrodskii | VUV Silicon Avalanche Detector | Ioffe RAS |
7 | J. Emmelkamp | Simulation model for the oxidation of Ru nanolayers under oxidizing/reducing plasma conditions | TNO |
8 | N.I. Chkalo | Cr/Sc/B4C multilayer mirrors with enhanced reflectance in “water window” | IPM RAS |
9 | A. Yakshin | Structural analysis of ion polished W/Si soft X-ray multilayer reflectors | U Twente |
10 | F. Melsheimer | Laser heating of pinch plasma for EUV emission: Determination of plasma parameters and spectrally resolved tomography | FZ Jülich |
11 | L. Bahrenberg | In-lab EUV spectroscopy for the characterization of optical properties and nanoscale geometries | RWTH |
12 | B. Lüttgenau | Modelling and experimental evaluation of near-field intensity distributions for high-resolution EUV transmission masks | RWTH |
13 | M. Ghafoori | Development of a multiangular broadband scatterometer for critical dimension metrology at EUV wavelength | RWTH EUV |
14 | S. Glabisch | Reconstruction of nanoscale gratings based on EUV reflectometry data and machine learning techniques | RWTH TOS |
15 | O. Maryasov | Diffraction grating characterization with grazing incidence EUV scattering | RWTH |
16 | J. Feikes | First experiment towards „Steady State Micro Bunching“ successfully performed at the Metrology Light Source | HZB |
17 | A. Fernández Herrero | Limits on the application of the Debye-Waller Factor in GISAXS | PTB |
18 | M. Ruiz-Lopez | Analysis of FLASH beamlines caustic supported by wavefront simulations | DESY |