Skip to main content


The seminar, the fifth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Previous seminars: 201120132015, 2017

Questions about further information may be addressed to: euv2019


21 October 2019 afternoon: PTB Adlershof laboratory visit
22 - 23 October 2019 full day: oral and poster sessions, 313. PTB-Seminar in Berlin

Get-together Dinner on the evening of 22 October 2019


The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

Confirmed invited speakers

*V. Banine, ASML (NL)     *H. Enkisch, Carl Zeiss SMT (D)     *M. Soman, Open University (UK)   

*I. Mantouvalou, MBI and TU Berlin (D)     *P. Schneider, JCMwave (D)     *S. Danylyuk, RWTH Aachen(D)

Sponsored by


If you are interested in sponsoring this event, please use the contact link to let us know.