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The seminar, the fifth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Previous seminars: 201120132015, 2017

Questions about further information may be addressed to: euv2019


21 October 2019 afternoon: PTB Adlershof laboratory visit
22 - 23 October 2019 full day: oral and poster sessions, 313. PTB-Seminar in Berlin

Get-together Dinner on the evening of 22 October 2019


The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

Sponsored by


If you are interested in sponsoring this event, please use the contact link to let us know.